Tilt Beam (MEMS)

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Tilt Beam (MEMS)The Model 6165 MEMS Tilt Beam is designed for attachment to structures, on either a vertical or horizontal surface, for the measurement of any tilting or differential settlements that may occur. The Tilt Beams can be coupled together in long horizontal strings to measure differential settlement along embankments, railroad tracks, pipelines, tunnels, etc. or they can be used in vertical strings to measure the horizontal deformation of retaining walls, sheet piling, etc. Readout is accomplished by using the Model RB-500 MEMS Readout Box or the Model 8600 Series Dataloggers.


  • Standard Range¹ : ±15°
  • Resolution : ±0.02 mm/m (±4 arc seconds)
  • Sensor Accuracy ² : ±0.05 mm/m (±10 arc seconds)
  • Sensor Output : ±4 V @ ±15°
  • Shock Survival : 2000 g
  • Temperature Range¹ : −20°C to +80°C
  • Beam Length¹ : 1029 mm (standard, aluminum version)


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